Open Course Space

Micro/Nano Processing Technology

Massachusetts Institute of TechnologyUnited States6.152J
Free, no sign-up neededFall 2005English
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This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication.

Description from MIT OpenCourseWare.

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