Open Course Space

Physics of Microfabrication: Front End Processing

Massachusetts Institute of TechnologyUnited States6.774
Free, no sign-up neededFall 2004English
Go to course on MIT OpenCourseWare

This course is offered to graduates and focuses on understanding the fundamental principles of the “front-end” processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion, ion implantation, and epitaxy.

Description from MIT OpenCourseWare.

Where to take this course