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Design and Fabrication of Microelectromechanical Devices

Massachusetts Institute of TechnologyUnited States6.777J
Free, no sign-up neededSpring 2007English
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6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a…

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