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Semiconductor Manufacturing

Massachusetts Institute of TechnologyUnited States6.780
Free, no sign-up neededSpring 2003English
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6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.

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