Open Course Space

Submicrometer and Nanometer Technology

Massachusetts Institute of TechnologyUnited States6.781J
Free, no sign-up neededSpring 2006English
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This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation.

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